Instrumentation within the KNI is focused on fabrication and metrology, enabling researchers to engage in the rapid prototyping and rigorous characterization of nanodevices. Nanoscale patterns are written with lithography tools, transferred to devices with deposition and etching equipment, and confirmed with a suite of electron, ion, optical and scanning probe microscopes. The lab is optimized to process up to 6" semiconductor wafers, and also supports microfluidic chip production with a multilayer soft lithography foundry. Altogether, the KNI is equipped for - and dedicated to - exploring the limits of nanofabrication.
The KNI Nanofabrication Cleanroom information booklet is available to download here.